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Design and optimization of linearly graded-doping junction termination extension for 3.3-kV-class IGBTs

蒋华平  陈万军  刘闯  饶祖刚  董彬  张波  
【摘要】:正A linearly graded-doping junction termination extension(LG-JTE) for 3.3-kV-class insulated gate bipolar transistors(IGBTs) was proposed and experimentally investigated.Unlike conventional multi-implantation utilizing more than one photolithography step,a single mask with injection window widths varied linearly away from the main junction to the edge was implemented in this proposed structure.Based on the simulation results,IGBTs with LG-JTE structures were successfully fabricated on the domestic process platform.The fabricated devices exhibited a 3.7 kV forward-blocking voltage,which is close to the theoretical value of an ideal parallel plane case. This is the first success in fabrication 3.3-kV-class IGBT in a domestic application.

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