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微纳电子技术        Micronanoelectronic Technology 主办：  中国电子科技集团公司第十三研究所 周期：  月刊 出版地：河北省石家庄市 语种：  中文 开本：  大16开 ISSN 1671-4776 CN 13-1314/TN 邮发代号 18-60 曾用半导体情报 创刊年：1964 ASPT来源刊 中国期刊网来源刊 同类杂志推荐 半导体光电 半导体学报 半导体杂志 电子与封装 红外技术 激光技术 激光与光电子学进展 微电子技术 印制电路信息 真空电子技术

[定制推送服务] [收藏本刊文章] [RSS 订阅] 微纳电子技术 2003年Z1期 目 录 前言 Overview of worldwide MEMS industry and market 微加工干法刻蚀工艺模拟工具的研究现状 Research of dry etching simulator in micromachining 周荣春,张海霞,郝一龙 缓冲层对多量子阱材料GaAs/Ga_(1-x)Al_xAs共振态的影响 Effect of buffer layer on resonant states in material GaAs/Ga_(1-x)Al_xAs 杨晓峰 纳米机械和微机械中杆的晶格振动内能与比热的理论研究 Theoretical study on lattice vibration energy and specific heat of staff in nano-machine and micro-machine 黄建平,李圣怡,吴学忠,罗兵 纳米机械和微机械中杆的晶格振动量子化 Lattice vibration quantization of staff in nano-machine and micro-machine 黄建平,李圣怡,吴学忠,罗兵 内建电场对应变多量子阱带阶的影响 The influence of built-electric on the band offsets of strained MQW 许丽萍 弓型悬臂梁微静电谐振器力学建模 Analysis on the mechanical preference of microresonators with meander suspensions 赵江铭,沈雪瑾,张海霞,陈晓阳 MEMS虚拟组装设计的建模研究 Study on modeling of virtual assembly in MEMS design 周弋云,赵新,卢桂章 微机械虚拟运行的实现框架 A feasible framework for virtual operation of MEMS devices 谭宜勇,赵新,卢桂章 基于部件库的MEMS设计方法 Partlibrarybased method of MEMS design 卢桂章,赵新 MEMS系统级设计与基于多端口组件网络的建模方法 Multi-port-element network based MEMS system level modeling methodology 马炳和,霍鹏飞,苑伟政 介观压阻效应 Meso-piezoresistance effect 温廷敦,张文栋 多层梁机电耦合系统的等效电路宏模型 An equivalent circuit macromodel for a multi-layer beam electromechanical coupled system 戎华,黄庆安,李伟华 力电耦合MEMS器件非线性行为的模拟 Modeling and simulation of nonlinear behavior of mechanical-electrostatic coupled MEMS devices 孙振新,黄庆安,李伟华 MEMS工艺集成化设计及其可视化 The integrated design and visualization of MEMS process 唐华锋,苑伟政 集成风速计片上系统的计算机模拟 Simulation of integrated wind flow sensor system on a chip 朱昊,秦明,黄庆安 平面微弹簧的模拟、加工制备和力学性能表征研究 Simulation,fabrication and characterization of planar microsprings 陈迪,石磊,朱军,李建华,倪智萍,刘景全,李以贵 微喷管内流动和换热的数值模拟与分析 Simulation and analysis for gas flow and heat transfer in micro nozzle 王沫然,陈泽敬,李志信 微气体流量计的模拟与优化 Simulations and optimization for micro gas flowmeter 王沫然,陈泽敬,李志信 两端固支梁吸合电压解析模型的拟合修正 Fitting correction for an analytical model of pull-in voltage of fixed-fixed beams 聂萌,黄庆安,王建华,戎华 气象检测微系统软件开发 Software development of the meteorological monitoring microsystem 胡德胜,张中平,黄庆安 一种新型微机械锚 A new micromechanical anchor structure 刘祖韬,黄庆安 悬臂梁的受控源等效电路宏模型的建立及验证 Creation and verification of the controlled source macromodel of equivalent circuit for cantilever beam 闻飞纳,李伟华,戎华 V型电致热微驱动器的力学特性分析 Mechanical analyzing of V-shaped cantilever electrothermal actuator 张永宇,沈雪瑾,陈晓阳 串联MEMS开关的瞬态电磁场分析 Transient field analysis for series MEMS switch 顾洪明,吕苗,单福琪,高葆新,梁春广 拓扑优化方法的研究现状及在微机构设计中的应用 Developments of topology optimization method and its application in micro-mechanism design 褚金奎,郝秀春,王立鼎 MEMS CAD系统IMEE的研究和开发 The research and development of MEMS CAD tool IMEE 张海霞,郭辉,肖志勇,周荣春,郝一龙 目标识别中的人工神经网络应用 Application of fuzzy neural network in target recognition 张彦军,刘俊,张文栋 确定氧化钇微细粉制备条件的神经网络方法 Neural networks method for parameter determination of yttrium oxide ultrafine making 黄茜,郑启伦 用于硅衬底隔离的选择性多孔硅厚膜的制备 Formation of selective thick porous silicon layers for insulating Si substrate 陈忠民,刘泽文,刘理天,李志坚 ICP硅深槽刻蚀中的线宽控制问题研究 Research of critical dimension loss control in the ICP etch of deep Silicon trenches 王成伟,闫桂珍,朱泳 退火处理对纳米ZnO膜结构及气敏特性的影响 Effects of annealing on gas sensing performance and microstructure of nano-grain ZnO films 马勇,王万录,廖克俊,葛芳芳 一种Au-Si键合强度检测结构与试验 The test structure and examination of Au-Si bonding intensity 王翔,李婷,王玮,王颖,田大宇,张大成 高深宽比深隔离槽的刻蚀技术研究 Fabrication technique of deep electrical isolation trenches using DRIE and medium refill 朱泳,闫桂珍,王成伟,王阳元 下一代曝光(NGL)技术的现状和发展趋势 The status and tendency of next generation lithography 李艳秋 真空键合技术制作三层结构的MEMS器件的研究 Research for sandwich MEMS device by vacuum bonding 杨国渝,税国华,张正元,温志渝 一种用于薄膜热容测量的微热量计的设计与制作 Design and fabrication of microcalorimeter for measuring heat capacity of thin films 宋青林,崔铮,夏善红,陈绍凤 利用紫外光刻技术进行SU8胶的研究 The research of SU8 resist using UV lithography 伊福廷,张菊芳,彭良强,韩勇 亚微米微球三维有序阵列的组装技术研究 Assembly of sub-micrometer spheres into 3D periodic structure 于尚慈,许静,谢凯,龙永福 SU-8胶及其在MEMS中的应用 SU-8 photoresist and its application in MEMS 刘景全,蔡炳初,陈迪,朱军,赵小林,杨春生 电化学制备亚微米氧化铝有序多孔膜方法研究 Electrochemically prepared submicron ordered porous alumina film 韩喻,谢凯 相对湿度对AFM针尖阳极氧化金属薄膜的影响 Relative humidity effect on AFM anodic oxidation of metal film 匡登峰,刘庆纲,郭维廉,张世林,胡小唐 BSRF上的微细塑铸研究 Research on moulding of microstructure at BSRF 韩勇,彭良强,陈迪,伊福廷,张菊芳,黄军容 3B1束线上LIGA掩模的设计研究 Design on X-ray masks for LIGA station in 3B1 beamline 黄军容,彭良强,伊福廷,蒋毅坚,张菊芳,韩勇 紫外线厚胶光刻技术研究及应用 Research and application of thick photoresist lithography using UV light 李雯,谭智敏,薛昕,刘理天 基于原子力显微镜(AFM)的微小结构加工工艺研究 Study on the processing technique of microstructure based on AFM 孙涛,闫永达,夏加飞,梁迎春,程凯,董申 脉冲激光MEMS加工技术 Applications of pulsed laser microfabrication technology in MEMS 李艳宁,唐洁,饶志军,宋晓辉,胡晓东,傅星,胡小唐 硅尖的制备 The fabrication technology of silicon tip 王艳华,孙道恒 SAL601负性电子束抗蚀剂纳米级集成电路加工 Nano-IC fabrication by SAL601chemical amplified negative resist 王云翔,刘明,陈宝钦,徐秋霞 微细金属粉末材料的激光快速微成型 Microfabrication of micron metallic powder with laser sintering 陈继民,左铁钏 双光子激光三维微细加工及信息存储技术 Two-photon laser three-dimensional microfabrication and three-dimensional optical data storage technology 袁大军,周拥军,蒋中伟,黄文浩,夏安东,褚家如,刘允萍 扫描探针加工技术的新进展及扫描等离子体加工技术的研究 Progress of scanning probe lithography and study on scanning plasma etching technology 王海,褚家如,赵钢 接近式光刻的计算机模拟研究 Study on computer simulation of proximity lithography 田学红,刘刚,田扬超,张新夷,张鹏 Ni和Ni-PTFE自润滑模具的脱模研究 Study of the demolding effects of the Ni and Ni-PTFE self-lubricated molding inserts 张鹏,刘刚,田扬超 二氧化锡溅射工艺研究 Study on sputtering process of tin oxide 冯海玉,黄元庆,冯勇建 电化学扫描探针显微镜在表面微/纳米加工的应用 Micro-and nano-fabrication by EC-SPM 汤儆,毛秉伟,田中群 在SPM通用平台上开发特殊功能扫描探针显微镜 Combine and design SPM based on commonly used platform of SPM 赵于勒 纳米压入法测量中初始接触点判断问题研究 Study on judging the initial contact point in nanoindentation 杨树明,朱强,赵则祥,蒋庄德 力学参数测量时由残余电荷导致的误差分析 Analysis of error induced by residual charges in mechanical parameters 姜岩峰,黄庆安 Development of packaging technologies for microsystems 基于模糊图像合成的微结构平面运动测量技术 Measurement technique of in-plane motion for micro-structure based on blur image synthesis 金翠云,栗大超,冯亚林,靳世久,曾周末,郝一龙,张大成 纳米硬度计在MEMS力学检测中的应用 Nanoindentation applying to mechanical measurement for MEMS 张泰华 MEMS薄膜横向断裂强度的在线测试——热驱动法 A new structure for measuring MEMS films fracture strength——thermal actuator 梅年松,黄庆安 显微干涉技术在MEMS动态测试系统中的应用 Application of microscopic interferometry in dynamic testing system of MEMS 郭彤,胡晓东,栗大超,胡春光,胡小唐 基于计算机视觉的MEMS测试系统 A MEMS testing system using computer microvision 冯亚林,栗大超,金翠云,郝一龙,张大成,靳世久 表面加工多晶硅薄膜热导率测试结构 Test structure for determination of thermal conductivity of surface micromachined polysilicon thin films 许高斌,黄庆安 原子力显微镜在生物力测量中的应用 Direct measurement of force in biology with AFM 王艳霞,李艳宁,傅星,李正光,胡小唐 现代微光电子封装中的倒装焊技术 Flip chip bonding technology used in modern micro-photoelectron package 裴为华,邓晖,陈弘达 MEMS中的封装技术研究 Study on packaging technology in MEMS 石云波,刘俊,张文栋 用于MEMS器件芯片级封装的金-硅键合技术研究 Investigation on Au-Si wafer bonding for MEMS device packaging 刘雪松,闫桂珍,郝一龙,张海霞 微加工硅表面基于AFM的纳米压痕测量与分析 Investigation of AFM-based nano-indentation on micro-machined silicon surface 赵清亮,梁迎春,程凯,董申 纳米压痕和划痕法测定氧化硅薄膜材料的力学特性 Nanoindentation and nanoscratch measurements on the mechanical properties of SiO_2 film 张海霞,张泰华,郇勇 MEMS圆片级气密封装微加热器阵列的设计和工艺研究 Design and fabrication of microheater array for MEMS wafer-level scale hermetic package 陈四海,陈明祥,易新建,刘胜,张鸿海,黄竹邻,汪学芳,王志勇 应用于MEMS气密性封装测试的微型湿度传感器的设计与制作 Design and fabrication of humidity sensor for MEMS hermetic package test 熊韬,易新建,陈四海,陈明祥,周少波 塑料生物芯片的激光焊接封装系统研究 Research on laser assisted bonding and packaging system for plastic biochips 陈西曲,赖建军,刘胜,易新建 应用于微系统封装的激光局部加热键合技术 Laser locally heating and bonding for microsystem packaging 赖建军,陈西曲,周宏,刘胜,易新建 基于AFM微加工的单晶硅表层性质的研究 Study on the AFM-based micro-machined silicon surface 赵清亮,梁迎春,程凯,董申 金属Cu表面三维齿状微图形的复制加工——约束刻蚀剂层技术 (CELT)的应用 Three-dimensional micromaching on Cu——application of confined etchant layer technique (CELT) 刘柱方,蒋利民,汤儆,张力,田昭武,刘品宽,曲东升,孙立宁,叶雄英,周兆英,田中群 MEMS封装中真空封口及真空度检测技术 Study of vacuum packaging and vacuum level testing technologies of MEMS packaging 张丽华,李军,邵崇俭 基于谐振原理的硅微机械加速度计 Micromachined accelerometer based on resonant principle 贾玉斌,郝一龙,钟莹,张嵘 微硅陀螺性能影响因素及其对策研究 Influence factors and enhancement on property of micro-silicon gyroscopes 吴学忠,刘宗林,李圣怡 叉指式微硅加速度计的参数化设计 Design of comb-driving micro-silicon accelerometers based on structure parameters 刘宗林,吴学忠,李圣怡 一种抗大过载微型加速度计研究 A novel piezoresistive accelerometer with high accuracy and overload ability 曾昭君,石进杰 旋转载体用硅微机械陀螺的动力学分析与仿真 Dynamics analysis and imitation of silicon micro-machined gyroscope using for circumrotation carrier 王宏伟,朱嘉林,张伟,张福学 二维电容式硅微加速度传感器的刚度求解 Solution of the stiffness of 2-D capacitive silicon microaccelerometer 刘妤,温志渝,张流强,梁玉前,温中泉,李霞 真空微电子加速度传感器结构的有限元分析 Finite element analysis on vacuum microelectronic acceleration sensor 彭述成,温志渝,温中泉,潘银松,李霞 MEMS隧道加速度计的系统分析与设计 System analysis and design of a MEMS tunneling accelerometer 董海峰,贾玉斌,郝一龙 环境振动测量电容式加速度传感器设计 Design of capacitive accelerometer for environment vibration measurement 周再发,黄庆安,秦明 具有双应变梁的硅微机械倾角传感器结构设计 Design of a micromechanical inclinometer with two strained silicon beams 孔德义,张涛,梅涛,倪林,孙斐,陶永春 一种微机械压阻式加速度传感器及其设计优化 A micromachined piezoresistive accelerometer and its design optimization 黄树森,郭南翔,黄晖,宋朝辉,李欣昕,王跃林 电磁驱动电容检测微机械陀螺的设计 Design of micromachined gyroscope with electromagnetic actuation and capacitive detection 宋朝辉,贾孟军,李昕欣 准LIGA微加速度开关的研制 Fabrication of UV-LIGA micro acceleration switch 陈光焱,何晓平,施志贵,丁元萍,赵龙 加工应力对双线振动式陀螺仪谐振频率的影响 Effect of process stress on resonance frequency of the double linear vibratory gyroscope 谢明媚,裘安萍,王寿荣 微机械热对流加速度传感器可靠性研究 Research on reliability of the MEMS convective accelerometer 杨拥军,吝海锋,师谦,徐爱东 PCR生物芯片微反应腔的制作及其热分析 Fabrication and thermal analysis of microchamber in PCR biochip 刘大震,闫卫平,郭吉洪,杜立群 芯片毛细管电泳激光诱导荧光检测系统的研究 Research of microchip capillary electrophoresis laser-induced fluorescence detection system 陈东,闫卫平,郝应光,马灵芝 芯片毛细管电泳电动进样的数值分析 Computer numerical analysis of electrokinetic injection in chip capillary electrophoresis 郑九文,闫卫平,刘冲,白吉玲 硅基PCR生物芯片微型加热器及温度传感器的研究 Research on the micro-heater and temperature sensor in PCR biochip 席文柱,闫卫平,杜立群,郭吉洪 金属硫蛋白(MT)分离纯化技术进展 Development of the purification for metallothionein (MT) 王翔,张大成,李婷,王玮,任宏伟,韩铁钢,俞梅敏 微型生化分析系统 Micro biochemical analysis system 温志渝,陈刚,潘银松,徐溢,李霞,蒋子平 毛细管电泳芯片的模拟设计与实验研究 Design and experiment research of integrated capillary electrophoresis chip 田丽,刘晓为,王喜莲,田雷,敖明胜,熊俊 电泳芯片的低电压分离模型及控制系统 Low voltage separation model and its control system for electrophoresis chip 李霞,温志渝,李星海,吴英,彭述成 影响低电压电泳芯片分离的主要因素 Effects on separating resolution and efficiency of electrophoresis chip 刘岗,温志渝,李霞,张流强,彭述成 BioMEMS——生物医学诊断和治疗的桥梁 BioMEMS——bridging of biomedical diagnostics and treatments 于晓梅,张大成 微流路生物芯片的研制 The research of biochip for electrophoresis 伊福廷,姜雄平,彭良强,张菊芳,韩勇 电化学生物传感器 Electrochemical biosensors 蔡新霞,李华清,饶能高,王利,崔大付 基于线阵电极电泳芯片的微全分析系统 Designing of capillary electrophoresis chips based on linear-arrayed electrode for μTAS 陈超,赵湛,张搏军 微生化芯片内光探测的研究 Optical detection on micro biochemical chip 李锋,吴一辉,鞠挥,贺敏英 PDMS微流控芯片中真空氧等离子体键合方法 Bonding for poly(dimethylsiloxane) microfluidic chip by oxygen plasma treatment under medium vacuum 沈德新,张春权,罗仲梓,周勇亮,张峰,李佳,田昭武 一种用于RF MEMS移相器及开关可变电容的复合微桥膜结构 A novel composite membrane bridge structure for RF MEMS phase shifter and switched tunable capacitor 缪旻,肖志勇,武国英,金玉丰,郝一龙 弯曲悬臂梁静电执行器驱动特性的实验研究 Research of actuation characteristic of a curved cantilever electrostatic actuator 刘素艳,牛凯,叶雄英,周兆英 MEMS微型燃料电池及其基于压电风扇的换气方法 MEMS-based micro fuel cell and its air supplying method by piezoelectric fan 杨兴,周兆英,叶雄英,王晓浩 双膜桥微波MEMS开关 Two membrane microwave MEMS switches 朱健,郁元卫,陆乐,贾世星,张龙 MEMS电磁执行器CoNi MnP永磁体阵列的制备 Electroplated CoNiMnP magnet array for MEMS actuator 张博军,赵湛,陈绍凤 基于MEMS技术的微型电场传感器设计与仿真 Design and simulation of a miniature electric field sensor based on MEMS technique 裴强,夏善红,龚超,白强,陈绍凤 微结构光寻址电位传感器阵列芯片的研制 Study and fabrication of microstructure array chip based on light addressable potentiometric sensors 韩泾鸿,张虹,顾丽波,徐磊,陈绍凤,王利,王蕾 基于砷化镓衬底的RF MEMS膜开关 RF MEMS membrane switches on GaAs substrates 郑惟彬,黄庆安,李拂晓,廖小平 基于键合技术的新型集成光学干涉仪 Integrated optical interferometer based on bonding technology 李以贵,惠春,宓晓宇,羽根一博 硅基PZT压电驱动MEMS光开关的设计与优化 Design and optimization of MEMS optical switch actuated by piezoelectric cantilever based on Si 方华军,刘建设,任天令,刘理天 基于双材料悬臂梁结构的非制冷红外成像系统 An uncooled infrared imaging system based on bi-material cantilever pixels 王玮冰,叶甜春,陈大鹏,伍小平,张青川,潘亮,段志辉 谐振式隧穿磁强计的理论研究 Theoretical study on resonant tunneling magnetometer 汤学华,尤政,杨建中 扭转微镜光学致动器研究 Novel torsion-mirror optical actuators 吴文刚,栗大超,袁勇,孙卫,阎桂珍,郝一龙,靳世久 Optimizing resistance of round hollow wire at high frequency 一种新型静电驱动的单轴扭转微镜 A novel electrostatically driven torisional micromirror 王丛舜,熊春阳,杨振川,张大成,方竞 AlGaN PIN结构紫外探测器研制和建模分析 Analysis of model and fabrication of AlGaN based PIN ultraviolet detectors 周劲,郝一龙,武国英 数字输出型多功能传感器研究 Study of multifunction sensor with data readout 陈伟平,田丽,田雷,李明江,孙立宁 M-Z型硅基ARROW压力传感器设计 Design of Mach-Zehnder interferometer for Si-based ARROW pressure sensor 肖素艳,王东红,刘晓为,秦建勇 MEMS兼容丝网印刷PZT压电厚膜研究 Investigation of PZT piezoelectric thick-film made by screen printing compatible with MEMS 王蔚,刘晓为,莫冰,王娟 真空微电子压力传感器阵列数据采集研究 Study on data acquisition of vacuum micro electronic pressure sensor array 潘银松,温志渝,梁玉前,蒋子平 一种基于间接标靶法的微小推力测量技术 A target indirect measurement method of microthrust 唐飞,叶雄英,周兆英 MEMS冷气推进器的制作及实验研究 Fabrication and experiment of a MEMS based cold gas thruster 唐飞,叶雄英,周兆英 微胶体推进器起始工作电压的估计方法研究 Evaluation of the onset voltage of a micro fabrication colloid thruster 熊继军,周兆英,叶雄英,王晓浩 大流量压阻式流量传感器的研制 Research on a piezoresistive mass flow sensor 王小保,钱劲,张大成 微小型高压力流体电磁控制阀 An electromagnetically actuated miniature valve for high pressure control 范瑞丽,李勇,陈旭鹏,叶雄英,周兆英 微小型化学能推进器的研究 Research into micro chemical thrusters 陈旭鹏,李勇,周兆英 一种新型的CMOS集成湿度传感器 A novel integrated humidity sensor compatible with CMOS 顾磊,秦明,黄庆安 一种半岛型结构谐振梁压力传感器 A resonant beam pressure sensor with a peninsular structure 陈德勇,崔大付,高晓童,范兆岩,王利 集成式五维微力/力矩传感器的研究 Study on an integrated five-dimension micro force/torque sensor 孙立宁,唐学燕,荣伟彬 CMOS工艺兼容多晶硅压力敏感膜的设计与加工 Design and fabrication of CMOS-compatible polysilicon diaphragms for pressure sensor applications 周闵新,秦明,黄庆安 SU-8微针执行器的研究 Research of SU-8 photoresist micro-actuator 秦宁,赵湛,陈绍凤,夏善红 MEMS运动件的芯片外机械驱动方法 The out-of-chip mechanical method for actuating MEMS parts 王皓,姚汉民,杜春雷,焦玉中 痕量爆炸物的化学、生物、MEMS传感器探测技术 Trace explosive detection with chemical sensor,biosensor and MEMS sensor techniques 张成梅,梅涛,孔德义,张彦 硅压阻式传感器的温度特性及其补偿 Temperature properties and compensation for silicon piezoresistive sensors 樊尚春,彭春荣 压阻式硅基传感器的温度补偿方法研究 Study on the temperature compensation method of piezoresistance silicon film sensor 郭涛,石云波,张文栋 A new touch mode capacitive pressure sensor with two deformable diaphragms A new touch mode capacitive pressure sensor with two deformable diaphragms 超细粒子催化剂作用下碳酸二甲酯的合成 Synthesis of dimethyl carbonate by ultrafine particle catalysts 江琦,王书明 高取向PZT厚膜的0-3复合法制备 Preparation of highly oriented PZT film by 0-3 composite method 陈超,褚家如,鲁健,杨艳 一种用于MEMS检测的无耦合六维力传感器的研制 Six-axis force/torque sensor for micro-testing system for MEMS 贺德建,张鸿海,刘胜,汪学方,王志勇 压电致动微喷的压力波特征分析 Characterization of the pressure wave in piezoelectrically actuated micro jet 冯焱颖,周兆英,叶雄英,王国辉 纳米技术——市场广阔的高技术前沿 钟先信 应力诱导碳纳米管电阻的变化 Stress-induced resistance changes in carbon nanotubes 王万录,王永田,廖克俊,刘高斌,李勇,马勇 化学处理增强碳纳米管的湿敏效应 Enhanced humidity effect of carbon nanotubes by chemical modified 王万录,吴子华,廖克俊,刘高斌,万步勇,王永田 碳纳米管电极上的电化学行为分析 Analysis of electrochemical behaviors on the carbon nanotube electrode 胡陈果,王万录,马勇,吴子华,胡江川 光聚合法对聚异丙基丙烯酰胺纳米凝胶粒径及形状的控制 Precise control of poly(N-isopropylacrylamide) nanogel by photopolymerization 乔向利,侯征迟,盛康龙,姚思德 纳米材料与微电极生物传感器 Nano-material and Microelectrode Biosensors 王利,蔡新霞,李华清,郭增军,饶能高 La-,Ca-PbTiO_3纳米晶的结构和声子特性 Structure of La-, Ca-PbTiO_3 nanocrystals and phonon characteristics 邓昱,张明生 自组装与纳米技术 Self-assembly and nanotechnology 郑明波,曹洁明,唐璐,常欣,邓少高,马贤佳,还大军,陶杰,徐国跃 纳米颗粒团聚的控制 The controlling of nanoparticle agglomerates 冯拉俊,刘毅辉,雷阿利 单壁纳米管薄膜在THz波段的电导性质 The conductivity of single walled nanotube films in terahertz region 韩家广,朱志远,王震遐,余礼平,张伟,孙立涛,王庭太 大规模制备定向排列的碳纳米管阵列 Large-scale preparation of aligned carbon nanotubes arrays 李聃,拜小东,徐化明,梁吉 驻波透镜聚焦原子束制作纳米图形研究 Study on making nano-patterns by atom standing wave lens 陈元培,陈旭南,李展,陈献忠 射频磁控溅射制备ZnO纳米薄膜的研究 The growth of ZnO nano-film by RF magnetic sputtering 李静,吴孙桃,钟灿 单层多晶的EEPROM Single poly EEPROM 任涛,刘志弘,朱钧 纳电子器件 Nanoelectronic devices 郭荣辉,赵正平,刘玉贵,武一宾,吕苗,杨拥军 电子束纳米光刻技术研究 E-beam nano-lithography technology research 刘玉贵,王维军,罗四维 加速度传感器信号处理集成电路的研制 Design and fabrication of signal processing integrated circuit for accelerometer 蓝慕杰,刘晓为,陈伟平,刘亚春,王美,王东旺 智能机器人的研究 Research on intelligent robot 王宇龙,熊继军,张文栋 基于4mm电磁型微马达的管道检测微机器人系统研究 Pipe inspection mobile microrobot system based on electromagnetic micromotor with 4mm diameter 陈佳品,李振波,张琛 微机电安全密码锁的设计技术 Design techniques for MEMS safety locks 高杨,文贵印,赵小林,陈文元,张琛 MEMS技术对火控系统的影响 The influence of MEMS techniques on the fire control system 段修生,程远增,孙书鹰 共振隧穿二极管基础电路的模拟与分析 Simulation and analysis of basic RTD-based circuits 程玥,许军 探空集成传感器设计 Design of integrated sensor for atmosphere research 武宇,方震,赵湛,陈超,张博军 微小机电强链中的驱动器 Driver applied in micro or small electromechanical stronglink 张卫平,陈文元,赵小林,高扬,吴校生 基于压电陶瓷驱动的微操作手研究现状 Current situation in the development of micromanipulator driven by piezoelectric actuator 荣伟彬,曲东升,孙立宁 往期检索 共283期    微纳电子技术：更多年   [2008] [2007] [2006]  微纳电子技术：2005年各期  [12] [11] [10] [09] [08] [07] [06] [05] [04] [03] [02] [01]  微纳电子技术：2004年各期  [12] [11] [10] [09] [08] [07] [06] [05] [04] [03] [02] [01]  微纳电子技术：2003年各期  [Z1] [12] [11] [10] [09] [06] [05] [04] [03] [02] [01]  微纳电子技术：2002年各期  [12] [11] [10] [09] [08] [07] [06] [05] [04] [03] [02] [01]  微纳电子技术：2001年各期  [06] [05] [04] [03] [02] [01] 微纳电子技术：更多年   [2000] [1999] [1998] [1997] [1996] [1995] [1994] [1993] [1992] [1991] [1990] [1989] [1988] [1987] [1986] [1985]  [1984] [1983] [1982] [1981] [1980] [1979] [1978] [1977] [1976] [1975] [1974] [1973] [1972] [1971]

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