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| 半导体技术 | | Semiconductor Technology | | 主办： 中国半导体行业协会;半导体专业情报网;中国电子科技集团公司第十三所 | | 周期： 月刊 | | 出版地：河北省石家庄市 | | 语种： 中文 | | 开本： 大16开 |
ISSN 1003-353X | | CN 13-1109/TN | | 邮发代号 18-65 | | 创刊年：1976 | | | 中国期刊网来源刊 | | 2004版核心期刊 | |
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| 2007年01期 |
| 目 录 |
 | MOSFET器件回顾与展望(下)
History and Perspective of MOSFET Device(Ⅱ) | | 肖德元 夏青 陈国庆 | | AlGaN/GaN HEMT欧姆接触的研究进展
Investigation on the Ohmic Contacts in AlGaN/GaN HEMTs | | 裴风丽 冯震 陈炳若 | | 用于光刻的EUV光源
EUV Light Sources for LithographyZHAO Huan-yu~(1,2),ZHAO Hong-wei~1(1.Institute of Modern Physics,CAS,Lanzhou 730000,China;2.Graduate School of the Chinese Academy of Sciences,Beijing 100049,China)Abstract:The general EUV sources,discharge produced plasma(DPP) and laser produced plasma(LPP),were compared in many respects.The virtues and challenges of each,some of which seem hard to overcome for now,were given.Based on the measurements,electron cyclotron resonance(ECR) plasma was introduced as a novel EUV source.Key words:lithography;EUV light source;DPP;LPP;ECR plasma | | 赵环昱 赵红卫 | | 300mm半导体代工厂的化学供应系统探讨
Study on the Chemical Dispense System in a 300 mm Semiconductor Foundry | | 张云秀 黄其煜 | | CMOS LC VCO中交叉耦合MOS管的结构和特点
Structure and Feature of Cross-Coupled MOS FET in CMOS LC VCO | | 宁彦卿 王志华 陈弘毅 | | 改进型抗单粒子效应D触发器
Improved D Flip Flop for SEE Mitigation | | 赵金薇 沈鸣杰 程君侠 | | 一种采用饱和区MOS管作调节开关的电荷泵
Charge Pump with a MOSFET Regulating Switch Working in Saturation Region | | 王少军 程珍娟 叶星宁 | | LDMOS射频功率放大器电热记忆效应研究
Research on the Electro-Thermal Memory Effect of LDMOS RF Power Amplifier | | 冯永生 刘元安 | | pH值对铌酸锂晶片抛光速率及抛光表面的影响
Effect of pH on the Polishing Velocity and Glazed Surface of LN Wafer | | 武晓玲 刘玉岭 王胜利 刘长宇 刘承霖 | | ICP刻蚀损伤对n-Ga N-Ni/Au肖特基接触特性的影响
Influence of ICP Induced Damage in n-Type GaN on Ni/Au Schottky Contact Characteristics | | 刘杰 王冲 冯倩 张进诚 郝跃 杨艳 龚欣 | | ICP刻蚀机反应腔室气流仿真研究
Gas Flow Simulation Research on Reaction Chamber of ICP Etcher | | 程嘉 朱煜 | | 不同钝化层对硅基铝金属膜应力影响的研究
Effects of Different Passivation Layer on Stress of Al Film on Si Substrate | | 李秀宇 吴月花 李志国 付厚奎 | | 一种基于DDS的改进信号合成电路设计
Improved Design of Digital Mixer with DDS | | 李琨 张汉富 张树丹 于宗光 | | 车载定位导航终端的设计
Design of Orientation and Navigation Terminal for Vehicles | | 郑凯 方康玲 | | FPGA中通用互连结构的设计与优化
Design and Optimization for the General Interconnect Architecture of FPGA | | 侯卫华 张惠国 刘战 高宁 施亮 刘明锋 于宗光 | | 2.45 GHz全集成CMOS功率放大器设计
Design of 2.45 GHz Fully Integrated CMOS Power Amplifier | | 徐国栋 朱丽军 兰盛昌 | | 高性能双模前置分频器设计
Design of High Performance Dual Modulus Divider-by Prescaler | | 曾健平 谢海情 晏敏 曾云 章兢 | | TSOP封装脱模中硅片碎裂失效的有限元分析(英文)
Analysis of TSOP Si Die Crack Issue in Mould Release Step by Finite Element Method | | 杨震宇 王明湘 许华平 | | 基于线阵CCD的光刻机调焦调平系统的研究
Research on Focus and Level System for Stepper Based on Linear Array CCD | | 尹作海 刘世元 史铁林 | | ESD电热模拟分析
Analysis of ESD Electrothermal Simulation | | 李永坤 郝跃 罗宏伟 | | 飞思卡尔汽车微控制器MPC5561提升智能安全性能 | | | | 分立器件信有明天 | | | | 中国半导体产业的春天在哪里 | | Peter Wu | | 综合新闻 | | | | 投稿论文格式 | | | | 新春寄语 | | 杨克武 |
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