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《Photonics Research》 2019年09期
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Compact CMOS spectral sensor for the visible spectrum

YIBO ZHU  XIN LEI  KEN XINGZE WANG  ZONGFU YU  
【摘要】:A compact single-shot complementary metal-oxide semiconductor(CMOS) spectral sensor for the visible range(wavelength 400–700 nm) is presented. The sensor consists of two-dimensional silicon nitride-based photonic crystal(PC) slabs atop CMOS photodetectors. The PC slabs are fabricated using one-step lithography and amenable to monolithic integration into CMOS image sensors. Featuring a small footprint of 300 μm× 350 μm,the sensor can successfully measure the spectra over the 400–700 wavelength range with a best resolution of1 nm. The footprint of the sensor may be further reduced to enable hyperspectral imaging with high spatial resolution.

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