Hot-wire chemical vapor deposition low-loss hydrogenated amorphous silicon waveguides for silicon photonic devices
【摘要】：
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SWE Z.OO;ANTULIO TARAZONA;ALI Z.KHOKHAR;RAFIDAH PETRA;YOHANN FRANZ;GORAN Z.MASHANOVICH;GRAHAM T.REED;ANNA C.PEACOCK;HAROLD M.H.CHONG;;Hot-wire chemical vapor deposition low-loss hydrogenated amorphous silicon waveguides for silicon photonic devices [J];Photonics Research;2019年02期
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张广军
,顾冬红
,干福熹
,孙真荣
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