收藏本站
《Engineering》 2015年03期
加入收藏 投稿

High-Throughput Multi-Plume Pulsed-Laser Deposition for Materials Exploration and Optimization

Samuel S.Mao  Xiaojun Zhang  
【摘要】:A high-throughput multi-plume pulsed-laser deposition(MPPLD) system has been demonstrated and compared to previous techniques. Whereas most com binatorial pulsedlaser deposition(PLD) systems have focused on achieving thickness uniformity using sequential multilayer deposition and masking followed by post-deposition annealing, MPPLD directly deposits a compositionally varied library of compounds using the directionality of PLD plumes and the resulting spatial variations of deposition rate. This system is more suitable for high-throughput compound thin-fllm fabrication.
【作者单位】Department
【关键词】pulsed-laser deposition high-throughput
【基金】:partially supported by the US Department of Energy
【分类号】:TN249
【正文快照】:
1 IntroductionModern advanced materials with novel properties requireincreasingly complex compositions.Although materialsdevelopment once focused on limited ranges of composi-tion that were amenable to sequential optimization in an“Edisonian”approach,n

【相似文献】
中国期刊全文数据库 前1条
1 岳江;韩静;张毅;柏连发;;High-throughput deconvolution-resolved computational spectrometer[J];Chinese Optics Letters;2014年04期
中国重要会议论文全文数据库 前1条
1 ;Dual Polarization Imaging by Using Liquid Crystal Tunable Filters[A];中国光学学会2010年光学大会论文集[C];2010年
中国知网广告投放
相关期刊
>Chinese Opti...
相关机构
>School
相关作者
>张毅 >柏连发
>岳江 >韩静
 快捷付款方式  订购知网充值卡  订购热线  帮助中心
  • 400-819-9993
  • 010-62791813
  • 010-62985026