收藏本站
收藏 | 投稿 | 手机打开
二维码
手机客户端打开本文

Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-Frequency Excitation

王晓敏  袁强华  周永杰  殷桂琴  董晨钟  
【摘要】:Polymer thin film deposition using an atmospheric pressure micro-plasma jet driven by dual-frequency excitations is described in this paper. The discharge process was operated with a mixture of argon(6 slm) and a small amount of acetone(0-2100 ppm). Plasma composition was measured by optical emission spectroscopy(OES). In addition to a large number of Ar spectra lines, we observed some spectra of C, CN, CH and C2. Through changing acetone content mixed in argon, we found that the optimum discharge condition for deposition can be characterized by the maximum concentration of carbonaceous species. The deposited film was characterized by scanning electron microscopy(SEM) and X-ray photoelectron spectroscopy(XPS) and Fourier transform infrared(FTIR) spectroscopy. The XPS indicated that the film was mostly composed of C with trace amount of O and N elements. The FTIR suggested di?erent carbon-containing bonds(-CHx, C=O, C=C, C-O-C) presented in the deposited film.

知网文化
中国知网广告投放
 快捷付款方式  订购知网充值卡  订购热线  帮助中心
  • 400-819-9993
  • 010-62982499
  • 010-62783978